LSW designed mechanical, plumbing, electrical and sprinkler systems for this facility. The cleanroom area is approximately 135,000 SF with 22,000 SF of laminar flow area. Wafer manufacturing, RO/DI water plant, waste treatment, central plant, chemical storage/mix and site work were included. Class 10,000 Probe, computer room, offices, break areas, restrooms, etc. made up the support spaces.

Cleanroom design included one complete recirculating Class 100 to Class 10 laminar flow system. LSW designed the make-up air system with temperature and humidity control utilizing local glycol chillers for dehumidification, and commercial grade pneumatic control. Exhaust headers and fan systems for acid, heat and solvents, and scrubbers on acid exhaust were included. Our coordinated distribution system of commercial grade process piping headers with patterned valved outlets for building services consisted of solvent dispenser piping, acid and solvent wastes, nitrogen, oxygen, hydrogen, argon, compressed air, dry air, vacuum, de-ionized water, raw water and chilled water.

Fire protection system designs were consistent with H6 and B2 Codes, including sprinklered FRP ducts, Halon and pre-action systems for sensitive areas, and wet sprinklers.

Special electrical design included evacuation alarms, card key security, master clock, communications, grounding, lightning protection, etc.

Reverse Osmosis/De-ionized Water Plant: LSW developed "P&ID" schematics. The plant capacity of 300-400 gpm (for two wafer modules) consisted of multiple unit, packaged type equipment and controls, incrementally expandable.

Waste Treatment Facility (Neutralization): LSW developed "P&ID" schematics. Process piping was designed to current industry standards and local codes to assure effluent quality. The capacity equated to the equivalent of 85% of DI plant.

Building 100 Central Plant Expansion: A 1,500-square-foot central plant expansion with chillers, towers, boilers, compressors, and vacuum pumps.

Chemical Storage and Mix Building: LSW developed "P&ID" schematics. Included were two buildings of 6,300 SF each for loading and unloading of cylinder gases, hazardous material storage, bottle crusher, etc.; similar to the Mesa, Arizona plant.

Owner: Motorola
Size: 130,000 SF (total)
Construction Cost: $28,000,000